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1

Deep reactivetion etching of silicon for plasma machining process in high aspect ratio structures for MEMS and 3 dimentional Ics

2

Deep reactivetion etching of silicon for plasma machining process in high aspect ratio structures for MEMS and 3 dimentional Ics

Language:English
3

Deep reactivetion etching of silicon for plasma machining process in high aspect ratio structures for MEMS and 3 dimentional Ics

4

Design of silicon photonic switches based on multi-mode interference coupler

Language:English