• Per Page:
  • Sort By:

Search results for ' ' (0.002 seconds ) Total Hits : 1

1

Characterrization of thin films of amorphous silicon nitride prepared by plasma enhanced chemical vapour deposition technique

Researcher:Gupta, Manju
Guide:Agnihotri, O P
Sehgal, H K
University:Indian Institute of Technology-Delhi
Language:English