| Type of Material: | Thesis |
| Title: | On the phosphorus diffusion in silicon in oxidising and chloro-oxidising ambients |
| Researcher: | Gupta, Anil Kumar |
| Guide: | Tyagi, M S |
| Department: | Department of Electrical Engineering |
| Publisher: | Indian Institute of Technology-Kanpur |
| Place: | Kanpur |
| Year: | 1987 |
| Language: | English |
| Subject: | Engineering | Electronics Engineering | Short and Long Wave Electronics | Semi Conductor Devices | Electrical Engineering |
| Dissertation/Thesis Note: | PhD |
| 000 | 00000ntm a2200000ua 4500 | |
| 001 | 82729 | |
| 003 | IN-AhILN | |
| 005 | 2011-01-13 00:00:00 | |
| 008 | __ | 871231t1987||||ii#||||g|m||||||||||eng|| |
| 035 | __ | |a(IN-AhILN)th_82729 |
| 040 | __ | |aIITK_208016|dIN-AhILN |
| 041 | __ | |aeng |
| 100 | __ | |aGupta, Anil Kumar|eResearcher |
| 110 | __ | |aDepartment of Electrical Engineering|bIndian Institute of Technology-Kanpur|dKanpur|eIn |
| 245 | __ | |aOn the phosphorus diffusion in silicon in oxidising and chloro-oxidising ambients |
| 260 | __ | |aKanpur|bIndian Institute of Technology-Kanpur|c1987 |
| 502 | __ | |bPhD |
| 650 | __ | |aElectrical Engineering|2UGC |
| 653 | __ | |aEngineering |
| 653 | __ | |aElectronics Engineering |
| 653 | __ | |aShort and Long Wave Electronics |
| 653 | __ | |aSemi Conductor Devices |
| 700 | __ | |aTyagi, M S|eGuide |
| 905 | __ | |anotification |
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