Title : study on the low temprature high pressure oxidation of silicon and gallium arsenide

Type of Material: Thesis
Title: study on the low temprature high pressure oxidation of silicon and gallium arsenide
Researcher: Basu, Nandita
Guide: Bhat, K N
Achuthan, M K
Department: Department of Electrical Engineering
Publisher: Indian Institute of Technology-madras
Place: Chennai
Year: 1988
Language: English
Subject: Engineering
Electrical Engineering
Generation of Electric Power
Applied Electrochemistry
Electrical Engineering
Dissertation/Thesis Note: PhD

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035__|a(IN-AhILN)th_72168
040__|aIITM_600036|dIN-AhILN
041__|aeng
100__|aBasu, Nandita|eResearcher
110__|aDepartment of Electrical Engineering|bIndian Institute of Technology-madras|dChennai|eIn
245__|astudy on the low temprature high pressure oxidation of silicon and gallium arsenide
260__|aChennai|bIndian Institute of Technology-madras|c1988
502__|bPhD
650__|aElectrical Engineering|2UGC
653__|aEngineering
653__|aElectrical Engineering
653__|aGeneration of Electric Power
653__|aApplied Electrochemistry
700__|aBhat, K N|eGuide
700__|aAchuthan, M K|eGuide
905__|anotification

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