Title : Preparation and characterization of plasma enchanced chemical vapour deposited silicon dioxide and polyoxide films

Type of Material: Thesis
Title: Preparation and characterization of plasma enchanced chemical vapour deposited silicon dioxide and polyoxide films
Researcher: Dixit, Bharat Bhushan
Guide: Srivastava, C M
Department: Department of Engineering
Publisher: Indian Institute of Technology-Bombay
Place: Mumbai
Year: 1991
Language: English
Subject: Engineering
Engineering Materials
Materials Science
Crystallography
Dissertation/Thesis Note: PhD

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035__|a(IN-AhILN)th_6312
040__|aIITB_400076|dIN-AhILN
041__|aeng
100__|aDixit, Bharat Bhushan|eResearcher
110__|aDepartment of Engineering|bIndian Institute of Technology-Bombay|dMumbai|eIn
245__|aPreparation and characterization of plasma enchanced chemical vapour deposited silicon dioxide and polyoxide films
260__|aMumbai|bIndian Institute of Technology-Bombay|c1991
502__|bPhD
653__|aEngineering
653__|aEngineering Materials
653__|aMaterials Science
653__|aCrystallography
700__|aSrivastava, C M|eGuide
905__|anotification

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