Title : Preparation and characterization of plasma enchanced chemical vapour deposited silicon dioxide and polyoxide films

Type of Material: Thesis
Title: Preparation and characterization of plasma enchanced chemical vapour deposited silicon dioxide and polyoxide films
Researcher: Dixit, Bharat Bhushan
Guide: Srivastava, C M
Department: Department of Engineering
Publisher: Indian Institute of Technology-Bombay
Place: Mumbai
Year: 1991
Language: English
Subject: Engineering
Engineering Materials
Materials Science
Crystallography
Dissertation/Thesis Note: PhD

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