| Type of Material: | Thesis |
| Title: | Studies on physical aspecrts of thin film equipment |
| Researcher: | Bhattacharyya, B C |
| Department: | Department of Electronics Engineering |
| Publisher: | Indian Institute of Technology-Madras |
| Place: | Chennai |
| Year: | 1974 |
| Language: | English |
| Subject: | Engineering | Electronics Engineering | Microelectronics |
| Dissertation/Thesis Note: | PhD |
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