Title : Studies on physical aspecrts of thin film equipment

Type of Material: Thesis
Title: Studies on physical aspecrts of thin film equipment
Researcher: Bhattacharyya, B C
Department: Department of Electronics Engineering
Publisher: Indian Institute of Technology-Madras
Place: Chennai
Year: 1974
Language: English
Subject: Engineering
Electronics Engineering
Microelectronics
Dissertation/Thesis Note: PhD

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035__|a(IN-AhILN)th_48343
040__|aIITM_600036|dIN-AhILN
041__|aeng
100__|aBhattacharyya, B C|eResearcher
110__|aDepartment of Electronics Engineering|bIndian Institute of Technology-Madras|dChennai|eIn
245__|aStudies on physical aspecrts of thin film equipment
260__|aChennai|bIndian Institute of Technology-Madras|c1974
502__|bPhD
653__|aEngineering
653__|aElectronics Engineering
653__|aMicroelectronics
905__|anotification

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