Title : Metal Ceramic Nano Composite Coatings by RF DC Magnetron Sputtering and Characterization

Type of Material: Thesis
Title: Metal Ceramic Nano Composite Coatings by RF DC Magnetron Sputtering and Characterization
Researcher: Hariharan, R
Guide: Raja, R
Department: Department of Mechanical Engineering
Publisher: Bharath University, Chennai
Place: Chennai
Year: 2021
Language: English
Subject: Engineering
Engineering and Technology
Engineering Mechanical
Mechanical engineering
Engineering and Technology
Dissertation/Thesis Note: PhD; Department of Mechanical Engineering, Bharath University, Chennai, Chennai; 2021
Fulltext: Shodhganga

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035__|a(IN-AhILN)th_455011
040__|aBHAU_600073|dIN-AhILN
041__|aeng
100__|aHariharan, R|eResearcher
110__|aDepartment of Mechanical Engineering|bBharath University, Chennai|dChennai|ein|0U-0446
245__|aMetal Ceramic Nano Composite Coatings by RF DC Magnetron Sputtering and Characterization
260__|aChennai|bBharath University, Chennai|c2021
300__|dDVD
502__|bPhD|cDepartment of Mechanical Engineering, Bharath University, Chennai, Chennai|d2021
520__|aIn this research work aluminum nitride (AlN) films were deposited using only RF reactive sputtering atmosphere of nitrogen and argon on mild steel (AISI 1018). Coatings were deposited on substrates at RT, 200ºC, 400ºC, 500ºC and 600ºC.The substrate temperature notably affected the thickness, crystalline grain size, and hardness of the coatings. To check the chemical composition, thickness, roughness, film structure, mechanical and corrosion properties of the film XRD, AFM, SEM, EDX, Nano indentation, salt spray or moisture to used. All samples showed excessive hardness values in some cases, 23 Gpa and Elastic modulus 222 Gpa at 500ºC. AlN with a lattice (a=2.80710 and#506;) parameter was developed under the conditions of high surface mobility. Two series of Al-Cu-N films containing Cu were grown by DC / RF magnetron sputtering of two elemental targets in an Ar / N and sub2; Gas mixture was deposited by biasing a high-speed steel substrate. The effect of Cu content and deposition conditions were investi
650__|aMechanical engineering|2UGC
650__|aEngineering and Technology|2AIU
653__|aEngineering
653__|aEngineering and Technology
653__|aEngineering Mechanical
700__|aRaja, R|eGuide
856__|uhttp://shodhganga.inflibnet.ac.in/handle/10603/355451|yShodhganga
905__|afromsg

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