| Type of Material: | Thesis |
| Title: | Performance analysis of diaphragm and cantilever based mems sensor for environmental applications |
| Researcher: | Nallathambi. A. |
| Guide: | Shanmuganantham, T. |
| Department: | Pondicherry of Engineering College |
| Publisher: | Pondicherry University, Puducherry |
| Place: | Pondicherry |
| Year: | 2016 |
| Language: | English |
| Subject: | Engineering and Technology | Engineering Electrical and Electronic | Electronics and Communication Engineering | Engineering and Technology |
| Dissertation/Thesis Note: | PhD; Pondicherry of Engineering College, Pondicherry University, Puducherry, Pondicherry; 2016 |
| Fulltext: | Shodhganga |
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| 100 | __ | |aNallathambi. A.|eResearcher |
| 110 | __ | |aPondicherry of Engineering College|bPondicherry University, Puducherry|dPondicherry|ein |
| 245 | __ | |aPerformance analysis of diaphragm and cantilever based mems sensor for environmental applications |
| 260 | __ | |aPondicherry|bPondicherry University, Puducherry|c2016 |
| 300 | __ | |dDVD|axxv, 175p. |
| 502 | __ | |bPhD|cPondicherry of Engineering College, Pondicherry University, Puducherry, Pondicherry|d2016 |
| 518 | __ | |oDate of Registration|d2012-08-10 |
| 650 | __ | |aElectronics and Communication Engineering|2UGC |
| 650 | __ | |aEngineering and Technology|2AIU |
| 653 | __ | |aEngineering and Technology |
| 653 | __ | |aEngineering Electrical and Electronic |
| 700 | __ | |aShanmuganantham, T.|eGuide |
| 856 | __ | |uhttp://shodhganga.inflibnet.ac.in/handle/10603/294420|yShodhganga |
| 905 | __ | |afromsg |
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