Type of Material: | Thesis |
Title: | Deposition and characterisation of spin-on-oxide(spoxide)film on silicon using an organosilicon compound |
Researcher: | Chakrabarti, Utpal kumar |
Guide: | Raju, T A |
Department: | Department of Electrical Communication Engineering |
Publisher: | Indian Institute of Science |
Place: | Bangalore |
Year: | 1979 |
Language: | English |
Subject: | Engineering | Electrical Engineering | Applied Electrochemistry |
Dissertation/Thesis Note: | PhD |
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001 | 43876 | |
003 | IN-AhILN | |
005 | 2011-01-13 00:00:00 | |
008 | __ | 791231t1979||||ii#||||g|m||||||||||eng|| |
035 | __ | |a(IN-AhILN)th_43876 |
040 | __ | |aIISC_560012|dIN-AhILN |
041 | __ | |aeng |
100 | __ | |aChakrabarti, Utpal kumar|eResearcher |
110 | __ | |aDepartment of Electrical Communication Engineering|bIndian Institute of Science|dBangalore|eIn |
245 | __ | |aDeposition and characterisation of spin-on-oxide(spoxide)film on silicon using an organosilicon compound |
260 | __ | |aBangalore|bIndian Institute of Science|c1979 |
502 | __ | |bPhD |
653 | __ | |aEngineering |
653 | __ | |aElectrical Engineering |
653 | __ | |aApplied Electrochemistry |
700 | __ | |aRaju, T A|eGuide |
905 | __ | |anotification |
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