| Type of Material: | Thesis |
| Title: | Study Of Thermal Effects On Optical Interference Lithography And Photoresist |
| Researcher: | Velmurugan .V |
| Guide: | Nirmala Grace .A and Raina .J.P |
| Publisher: | VIT University |
| Place: | Vellore |
| Language: | English |
| Dissertation/Thesis Note: | PhD |
| Fulltext: | Shodhganga |
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| 100 | __ | |aVelmurugan .V|eResearcher |
| 245 | __ | |aStudy Of Thermal Effects On Optical Interference Lithography And Photoresist |
| 260 | __ | |aVellore|bVIT University |
| 502 | __ | |bPhD |
| 700 | __ | |aNirmala Grace .A and Raina .J.P|eGuide |
| 856 | __ | |uhttp://shodhganga.inflibnet.ac.in/handle/10603/204325|yShodhganga |
| 905 | __ | |anotification |
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