Title : Synthesis and characterization of titanium titanium nitride thin films prepared by DC reactive magnetron sputtering with supported discharge

Type of Material: Thesis
Title: Synthesis and characterization of titanium titanium nitride thin films prepared by DC reactive magnetron sputtering with supported discharge
Researcher: A, Kavitha
Guide: Kannan, R
Publisher: Anna University
Place: Chennai
Language: English
Dissertation/Thesis Note: PhD
Fulltext: Shodhganga

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0052018-08-14 11:45:39
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035__|a(IN-AhILN)th_413570
040__|aANNA_600025|dIN-AhILN
041__|aeng
100__|aA, Kavitha|eResearcher
245__|aSynthesis and characterization of titanium titanium nitride thin films prepared by DC reactive magnetron sputtering with supported discharge
260__|aChennai|bAnna University
502__|bPhD
700__|aKannan, R|eGuide
856__|uhttp://shodhganga.inflibnet.ac.in/handle/10603/181242|yShodhganga
905__|anotification

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