| Type of Material: | Thesis |
| Title: | Synthesis characterization and lithographic evaluation of plasma polymerized and#945;_methylstyrene and chlorinated and#945;_methylstyrene as e_beam resist |
| Researcher: | Gosavi, Suresh |
| Guide: | Gangal, S A |
| Publisher: | Savitribai Phule Pune University |
| Place: | Pune |
| Language: | English |
| Dissertation/Thesis Note: | PhD |
| Fulltext: | Shodhganga |
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| 001 | 378797 | |
| 003 | IN-AhILN | |
| 005 | 2018-08-14 08:41:33 | |
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| 035 | __ | |a(IN-AhILN)th_378797 |
| 040 | __ | |aPUNE_411007|dIN-AhILN |
| 041 | __ | |aeng |
| 100 | __ | |aGosavi, Suresh|eResearcher |
| 245 | __ | |aSynthesis characterization and lithographic evaluation of plasma polymerized and#945;_methylstyrene and chlorinated and#945;_methylstyrene as e_beam resist |
| 260 | __ | |aPune|bSavitribai Phule Pune University |
| 502 | __ | |bPhD |
| 700 | __ | |aGangal, S A|eGuide |
| 856 | __ | |uhttp://shodhganga.inflibnet.ac.in/handle/10603/139868|yShodhganga |
| 905 | __ | |anotification |
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