| Type of Material: | Thesis |
| Title: | Development and characterization of novel masking materials _polymers_ for silicon micromachining |
| Researcher: | Bodas, Dhananjay S |
| Guide: | Gangal, S A |
| Publisher: | Savitribai Phule Pune University |
| Place: | Pune |
| Language: | English |
| Dissertation/Thesis Note: | PhD |
| Fulltext: | Shodhganga |
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| 001 | 373596 | |
| 003 | IN-AhILN | |
| 005 | 2018-08-14 08:15:57 | |
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| 035 | __ | |a(IN-AhILN)th_373596 |
| 040 | __ | |aPUNE_411007|dIN-AhILN |
| 041 | __ | |aeng |
| 100 | __ | |aBodas, Dhananjay S|eResearcher |
| 245 | __ | |aDevelopment and characterization of novel masking materials _polymers_ for silicon micromachining |
| 260 | __ | |aPune|bSavitribai Phule Pune University |
| 502 | __ | |bPhD |
| 700 | __ | |aGangal, S A|eGuide |
| 856 | __ | |uhttp://shodhganga.inflibnet.ac.in/handle/10603/133560|yShodhganga |
| 905 | __ | |anotification |
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