Title : Design and development of a photothermal imager for wafer metrology and subsurface microscopy

Type of Material: Thesis
Title: Design and development of a photothermal imager for wafer metrology and subsurface microscopy
Researcher: Sreekumar K
Guide: Vaidyan V K
Publisher: University of Kerala
Place: Thiruvananthapuram
Language: English
Dissertation/Thesis Note: PhD
Fulltext: Shodhganga

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035__|a(IN-AhILN)th_345755
040__|aCUKK_671123|dIN-AhILN
041__|aeng
100__|aSreekumar K|eResearcher
245__|aDesign and development of a photothermal imager for wafer metrology and subsurface microscopy
260__|aThiruvananthapuram|bUniversity of Kerala
502__|bPhD
700__|aVaidyan V K|eGuide
856__|uhttp://shodhganga.inflibnet.ac.in/handle/10603/99607|yShodhganga
905__|anotification

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