Title : Studies on the design of electron cyclotron resonance plasma sources and its interaction with materials

Type of Material: Thesis
Title: Studies on the design of electron cyclotron resonance plasma sources and its interaction with materials
Researcher: Batham, Parshant Kumar
Guide: Bajpai, R P
Publisher: Panjab University
Place: Chandigarh
Language: English
Dissertation/Thesis Note: PhD
Fulltext: Shodhganga

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035__|a(IN-AhILN)th_329646
040__|aPULC_160014|dIN-AhILN
041__|aeng
100__|aBatham, Parshant Kumar|eResearcher
245__|aStudies on the design of electron cyclotron resonance plasma sources and its interaction with materials
260__|aChandigarh|bPanjab University
502__|bPhD
700__|aBajpai, R P|eGuide
856__|uhttp://shodhganga.inflibnet.ac.in/handle/10603/79996|yShodhganga
905__|anotification

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