Title : Kinetics of glow discharge: dependence of the angular distribution of sputtering produced by positive ions from metal targets on their angle of impact

Type of Material: Thesis
Title: Kinetics of glow discharge: dependence of the angular distribution of sputtering produced by positive ions from metal targets on their angle of impact
Researcher: Rane, Subhashchandra Ramrao
Department: Department of Electronics Engineering
Publisher: University of Mumbai
Place: Mumbai
Year: 1965
Language: English
Subject: Electricity
Electronics
Ionisation of Gases
Dissertation/Thesis Note: PhD

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