Type of Material: | Thesis |
Title: | Growth and morphological studies of hydrogenated diamond like carbon films deposited by radio frequency plasma enhanced chemical vapour deposition |
Researcher: | Maheswaran, R |
Guide: | John, Thiruvadigal D |
Department: | Department of Physics |
Publisher: | SRM University |
Place: | Kattankulathur |
Year: | 2012 |
Language: | English |
Subject: | Physics | Diamond | Chemical vapour deposition | Physics |
Dissertation/Thesis Note: | PhD |
Fulltext: | Shodhganga |
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035 | __ | |a(IN-AhILN)th_263311 |
040 | __ | |aSRMI_600033|dIN-AhILN |
041 | __ | |aeng |
100 | __ | |aMaheswaran, R|eResearcher |
110 | __ | |aDepartment of Physics|bSRM University|dKattankulathur |
245 | __ | |aGrowth and morphological studies of hydrogenated diamond like carbon films deposited by radio frequency plasma enhanced chemical vapour deposition |
260 | __ | |aKattankulathur|bSRM University|c2012 |
502 | __ | |bPhD |
518 | __ | |oDate of Notification|d2012 |
520 | __ | |aDiamond-like carbon (DLC) is a name attributed to a variety of amorphous carbon materials, containing hydrogen in various range of atm.% of hydrogen, some containing up to about 50 atm.% hydrogen (a-C:H) and some other contains less than 1 atm.% (a-C ). |
650 | __ | |aPhysics|2UGC |
653 | __ | |aPhysics |
653 | __ | |aDiamond |
653 | __ | |aChemical vapour deposition |
700 | __ | |aJohn, Thiruvadigal D|eGuide |
856 | __ | |uhttp://shodhganga.inflibnet.ac.in/handle/10603/10477|yShodhganga |
905 | __ | |anotification |
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