Title : Growth and morphological studies of hydrogenated diamond like carbon films deposited by radio frequency plasma enhanced chemical vapour deposition

Type of Material: Thesis
Title: Growth and morphological studies of hydrogenated diamond like carbon films deposited by radio frequency plasma enhanced chemical vapour deposition
Researcher: Maheswaran, R
Guide: John, Thiruvadigal D
Department: Department of Physics
Publisher: SRM University
Place: Kattankulathur
Year: 2012
Language: English
Subject: Physics
Diamond
Chemical vapour deposition
Physics
Dissertation/Thesis Note: PhD
Fulltext: Shodhganga

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035__|a(IN-AhILN)th_263311
040__|aSRMI_600033|dIN-AhILN
041__|aeng
100__|aMaheswaran, R|eResearcher
110__|aDepartment of Physics|bSRM University|dKattankulathur
245__|aGrowth and morphological studies of hydrogenated diamond like carbon films deposited by radio frequency plasma enhanced chemical vapour deposition
260__|aKattankulathur|bSRM University|c2012
502__|bPhD
518__|oDate of Notification|d2012
520__|aDiamond-like carbon (DLC) is a name attributed to a variety of amorphous carbon materials, containing hydrogen in various range of atm.% of hydrogen, some containing up to about 50 atm.% hydrogen (a-C:H) and some other contains less than 1 atm.% (a-C ).
650__|aPhysics|2UGC
653__|aPhysics
653__|aDiamond
653__|aChemical vapour deposition
700__|aJohn, Thiruvadigal D|eGuide
856__|uhttp://shodhganga.inflibnet.ac.in/handle/10603/10477|yShodhganga
905__|anotification

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