Title : Design and fabrication of mems cantilever and other beam structures

Type of Material: Thesis
Title: Design and fabrication of mems cantilever and other beam structures
Researcher: Dutta, Shankar
Guide: Chatterjee, Ratnamala
Department: Department of Physics
Publisher: Indian Institute of Technology Delhi
Place: New Delhi
Year: 2012
Language: English
Subject: Physics
Physical science
Beam structures
Fabrication design
Physics
Dissertation/Thesis Note: PhD

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035__|a(IN-AhILN)th_253128
040__|aIITD_110016|dIN-AhILN
041__|aeng
100__|aDutta, Shankar|eResearcher
110__|aDepartment of Physics|bIndian Institute of Technology Delhi|dNew Delhi
245__|aDesign and fabrication of mems cantilever and other beam structures
260__|aNew Delhi|bIndian Institute of Technology Delhi|c2012
502__|bPhD
650__|aPhysics|2UGC
653__|aPhysics
653__|aPhysical science
653__|aBeam structures
653__|aFabrication design
700__|aChatterjee, Ratnamala|eGuide
905__|anotification

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