| Type of Material: | Thesis |
| Title: | Investigation of RF sputtered films for rapid propotyping of MEMS |
| Researcher: | Bhatt, Vivekanand |
| Guide: | Chandra, Sudhir |
| Department: | Centre for Applied Research in Electronics |
| Publisher: | Indian Institute of Technology Delhi |
| Place: | New Delhi |
| Year: | 2009 |
| Language: | English |
| Subject: | Electronics Engineering |
| Dissertation/Thesis Note: | PhD |
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| 001 | 238637 | |
| 003 | IN-AhILN | |
| 005 | 2011-08-24 12:36:26 | |
| 008 | __ | 110824t2009||||ii#||||g|m||||||||||eng|| |
| 035 | __ | |a(IN-AhILN)th_238637 |
| 040 | __ | |aIITD_110016|dIN-AhILN |
| 041 | __ | |aeng |
| 100 | __ | |aBhatt, Vivekanand|eResearcher |
| 110 | __ | |aCentre for Applied Research in Electronics|bIndian Institute of Technology,Delhi|dNew Delhi |
| 245 | __ | |aInvestigation of RF sputtered films for rapid propotyping of MEMS |
| 260 | __ | |aNew Delhi|bIndian Institute of Technology Delhi|c2009 |
| 502 | __ | |bPhD |
| 653 | __ | |aElectronics Engineering |
| 700 | __ | |aChandra, Sudhir|eGuide |
| 905 | __ | |anotification |
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