Title : A study of frontside teching technology in the fabrication of vacuum sealed absolute micro pressure sensor

Type of Material: Thesis
Title: A study of frontside teching technology in the fabrication of vacuum sealed absolute micro pressure sensor
Researcher: Alvi, Parvej Ahmad
Guide: Lal, K M
Department: Department of Applied Physics
Publisher: Aligarh Muslim University
Place: Aligarh
Year: 2009
Language: English
Subject: Applied Physics
Dissertation/Thesis Note: PhD

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035__|a(IN-AhILN)th_237055
040__|aAMUL_202002|dIN-AhILN
041__|aeng
100__|aAlvi, Parvej Ahmad|eResearcher
110__|aDepartment of Applied Physics|bAligarh Muslim University|dAligarh
245__|aA study of frontside teching technology in the fabrication of vacuum sealed absolute micro pressure sensor
260__|aAligarh|bAligarh Muslim University|c2009
502__|bPhD
653__|aApplied Physics
700__|aLal, K M|eGuide
905__|anotification

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