Title : Preparation and Cherecterization of ferroelectric/piezoelectric thin films of PIZT/ZaO and their integration with mems processing

Type of Material: Thesis
Title: Preparation and Cherecterization of ferroelectric/piezoelectric thin films of PIZT/ZaO and their integration with mems processing
Researcher: Ravindra, Singh
Guide: Chandra, Sudhir
Goel, T C
Department: Centre for Applied Research and Electronics
Publisher: Indian Institute of Technology Delhi
Place: New Delhi
Year: 2008
Language: English
Subject: Electronics Engineering
Dissertation/Thesis Note: PhD

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035__|a(IN-AhILN)th_211932
040__|aIITD_110016|dIN-AhILN
041__|aeng
100__|aRavindra, Singh|eResearcher
110__|aCentre for Applied Research and Electronics|bIndian Institute of Technology Delhi|dNew Delhi|eIN
245__|aPreparation and Cherecterization of ferroelectric/piezoelectric thin films of PIZT/ZaO and their integration with mems processing
260__|aNew Delhi|bIndian Institute of Technology Delhi|c2008
502__|bPhD
653__|aElectronics Engineering
700__|aChandra, Sudhir|eGuide
700__|aGoel, T C|eGuide
905__|anotification

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