| Type of Material: | Thesis |
| Title: | ECR based plasma assisted chemical etching of semiconductors |
| Researcher: | Bhardwaj, Ram Krishan |
| Guide: | Singh, Nirmal | Bajpai, R P | Bhardwaj, L M |
| Department: | Department of Physics |
| Publisher: | Panjab University |
| Place: | Chandigarh |
| Year: | 2008 |
| Language: | English |
| Subject: | Physics | Physical Sciences | Science & Technology | Physics |
| Accession No: | Vol-46(15) April 14-20, 2008 |
| Dissertation/Thesis Note: | PhD |
| Fulltext: | Shodhganga |
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| 245 | __ | |aECR based plasma assisted chemical etching of semiconductors |
| 260 | __ | |aChandigarh|bPanjab University|c2008 |
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| 653 | __ | |aPhysics |
| 653 | __ | |aPhysical Sciences |
| 653 | __ | |aScience & Technology |
| 700 | __ | |aSingh, Nirmal|eGuide |
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