| Type of Material: | Thesis |
| Title: | Growth and characterization of aluminum nitride (AIN) films for electroacoustic and mems applications |
| Researcher: | Kar, Jyoti Prakash |
| Guide: | Bose, G | Tuli, S |
| Department: | Centre for Applied Research in Electronics |
| Publisher: | Indian Institute of Technology Delhi |
| Place: | New Delhi |
| Year: | 2007 |
| Language: | English |
| Subject: | Engineering Sciences | Electronics & Communication Engineering |
| Accession No: | 45(36) |
| Dissertation/Thesis Note: | PhD |
| 000 | 00000ntm a2200000ua 4500 | |
| 001 | 169863 | |
| 003 | IN-AhILN | |
| 005 | 2011-01-13 00:00:00 | |
| 008 | __ | 071231t2007||||ii#||||g|m||||||||||eng|| |
| 035 | __ | |a(IN-AhILN)th_169863 |
| 040 | __ | |aIITD_110016|dIN-AhILN |
| 041 | __ | |aeng |
| 100 | __ | |aKar, Jyoti Prakash|eResearcher |
| 110 | __ | |aCentre for Applied Research in Electronics|bIndian Institute of Technology Delhi|dNew Delhi |
| 245 | __ | |aGrowth and characterization of aluminum nitride (AIN) films for electroacoustic and mems applications |
| 260 | __ | |aNew Delhi|bIndian Institute of Technology Delhi|c2007 |
| 502 | __ | |bPhD |
| 653 | __ | |aEngineering Sciences |
| 653 | __ | |aElectronics & Communication Engineering |
| 700 | __ | |aBose, G|eGuide |
| 700 | __ | |aTuli, S|eGuide |
| 852 | __ | |p45(36) |
| 905 | __ | |anotification |
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