| Type of Material: | Thesis |
| Title: | Some novel proceses and techniques for mems design fabricationa nd characterization |
| Researcher: | Pal, Prem |
| Guide: | Sudhir Chandra | Tuli, Suneet |
| Department: | Centre for Applied Research in Engineering |
| Publisher: | Indian Institute of Technology,Delhi |
| Place: | New Delhi |
| Year: | 2005 |
| Language: | English |
| Subject: | Engineering Science | Applied Research |
| Accession No: | Vol 43 Issue 25 |
| Dissertation/Thesis Note: | PhD |
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| 001 | 165246 | |
| 003 | IN-AhILN | |
| 005 | 2011-01-13 00:00:00 | |
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| 040 | __ | |aIITD_110016|dIN-AhILN |
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| 100 | __ | |aPal, Prem|eResearcher |
| 110 | __ | |aCentre for Applied Research in Engineering|bIndian Institute of Technology,Delhi|dNew Delhi|eIN |
| 245 | __ | |aSome novel proceses and techniques for mems design fabricationa nd characterization |
| 260 | __ | |aNew Delhi|bIndian Institute of Technology,Delhi|c2005 |
| 502 | __ | |bPhD |
| 653 | __ | |aEngineering Science |
| 653 | __ | |aApplied Research |
| 700 | __ | |aSudhir Chandra|eGuide |
| 700 | __ | |aTuli, Suneet|eGuide |
| 852 | __ | |pVol 43 Issue 25 |
| 905 | __ | |anotification |
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