| Type of Material: | Thesis |
| Title: | Proximity exposure compensation and phenomenon of resist debris formation in electron beam lihthography |
| Researcher: | Deshmukh, P R |
| Department: | Department of Electronics Engineering |
| Publisher: | Banaras Hindu University |
| Place: | Varanasi |
| Year: | 1994 |
| Language: | English |
| Subject: | Structural | Electronic |
| Accession No: | 791754%792385 |
| Dissertation/Thesis Note: | PhD |
| 000 | 00000ntm a2200000ua 4500 | |
| 001 | 140208 | |
| 003 | IN-AhILN | |
| 005 | 2011-01-13 00:00:00 | |
| 008 | __ | 941231t1994||||ii#||||g|m||||||||||eng|| |
| 035 | __ | |a(IN-AhILN)th_140208 |
| 040 | __ | |aBHUL_221005|dIN-AhILN |
| 041 | __ | |aeng |
| 100 | __ | |aDeshmukh, P R|eResearcher |
| 110 | __ | |aDepartment of Electronics Engineering|bBanaras Hindu University|dVaranasi|eIN |
| 245 | __ | |aProximity exposure compensation and phenomenon of resist debris formation in electron beam lihthography |
| 260 | __ | |aVaranasi|bBanaras Hindu University|c1994 |
| 502 | __ | |bPhD |
| 653 | __ | |aStructural |
| 653 | __ | |aElectronic |
| 852 | __ | |p791754%792385 |
| 905 | __ | |anotification |
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