Title : Growth and electrical characterization of dry and wet ultrathin plasma oxide with In-Situ dry cleaning of silicon surface

Type of Material: Thesis
Title: Growth and electrical characterization of dry and wet ultrathin plasma oxide with In-Situ dry cleaning of silicon surface
Researcher: Upadhyay, Har Narayan
Department: Department of Electronics Engineering
Publisher: Banaras Hindu University
Place: Varanasi
Year: 1993
Language: English
Subject: Electromagnetic theory
Accession No: 791351
Dissertation/Thesis Note: PhD

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035__|a(IN-AhILN)th_140201
040__|aBHUL_221005|dIN-AhILN
041__|aeng
100__|aUpadhyay, Har Narayan|eResearcher
110__|aDepartment of Electronics Engineering|bBanaras Hindu University|dVaranasi|eIN
245__|aGrowth and electrical characterization of dry and wet ultrathin plasma oxide with In-Situ dry cleaning of silicon surface
260__|aVaranasi|bBanaras Hindu University|c1993
502__|bPhD
653__|aElectromagnetic theory
852__|p791351
905__|anotification

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