Title : Studies related to the process modelling of diffusion in silicon device technology

Type of Material: Thesis
Title: Studies related to the process modelling of diffusion in silicon device technology
Researcher: Eranna, G
Guide: Subba Rao, G V
Department: Department of Physics
Publisher: Indian Institute of Technology-madras
Place: Chennai
Year: 1985
Language: English
Subject: Physics
Electronics
Electrodynamics
Conduction
Semi Conductor
Physics
Dissertation/Thesis Note: PhD

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008__851231t1985||||ii#||||g|m||||||||||eng||
035__|a(IN-AhILN)th_111264
040__|aIITM_600036|dIN-AhILN
041__|aeng
100__|aEranna, G|eResearcher
110__|aDepartment of Physics|bIndian Institute of Technology-madras|dChennai|eIn
245__|aStudies related to the process modelling of diffusion in silicon device technology
260__|aChennai|bIndian Institute of Technology-madras|c1985
502__|bPhD
650__|aPhysics|2UGC
653__|aPhysics
653__|aElectronics
653__|aElectrodynamics
653__|aConduction
653__|aSemi Conductor
700__|aSubba Rao, G V|eGuide
905__|anotification

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