Title : Photodeposition of silicon nitride and study of its interface properties

Type of Material: Thesis
Title: Photodeposition of silicon nitride and study of its interface properties
Researcher: Rathi, Virendra Kumar
Guide: Chari, K S
Vankar, V D
Agnihotri, O P
Department: Department of Physics
Publisher: Indian Institute of Technology-delhi
Place: New Delhi
Year: 1995
Language: English
Subject: Physical Sciences
Physics
Physics
Dissertation/Thesis Note: PhD

00000000ntm a2200000ua 4500
001100580
003IN-AhILN
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008__951231t1995||||ii#||||g|m||||||||||eng||
035__|a(IN-AhILN)th_100580
040__|aIITD_110016|dIN-AhILN
041__|aeng
100__|aRathi, Virendra Kumar|eResearcher
110__|aDepartment of Physics|bIndian Institute of Technology-delhi|dNew Delhi|eIn
245__|aPhotodeposition of silicon nitride and study of its interface properties
260__|aNew Delhi|bIndian Institute of Technology-delhi|c1995
502__|bPhD
650__|aPhysics|2UGC
653__|aPhysical Sciences
653__|aPhysics
700__|aChari, K S|eGuide
700__|aVankar, V D|eGuide
700__|aAgnihotri, O P|eGuide
905__|anotification

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