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00000cas a2200000ua 4500 |
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8833 |
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|aIN-AhILN |
|
005
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|a20220321 000000.0 |
|
007
|
|
|at| |
|
008
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|a750320c19929999dcuwn p 0 a0eng |
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016
|
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|2IN-AhILN|aUMS8833|zINFL20478 |
|
022
|
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|a1057-7157 |
|
030
|
|
|aJMIYET |
|
041
|
|
|aeng |
|
044
|
|
|dUS |
|
082
|
|
|a621.38 |
|
222
|
|
|aIEEE Journal of Microelectromechanical Systems |
|
245
|
10 |
|aIEEE Journal of Microelectromechanical Systems |
|
260
|
|
|aNew York|bInstitute of Electrical and Electronics Engineers |
|
310
|
|
|aQuarterly |
|
362
|
|
|a1992 |
|
500
|
|
|aAlso avail. in microfiche |
|
500
|
|
|aAlso available CD-ROM |
|
500
|
|
|aCovers all aspects of the science, engineering, design and applications in the MEMS area |
|
650
|
|
|aENGINEERING - ELECTRICAL ENGINEERING |
