| Key Title | Journal of Vacuum Science and Technology B. Microelectronics Processing and Phenomena |
|---|---|
| Publisher | American Vacuum Society |
| Language | |
| Country | United States |
| Place | New York |
| Publication Date | 1983 |
| Topics | PHYSICS |
| ISSN | 0734211X, 1071-1023 |
| Dewey | 533.5 |
| University | HYDR_500046, IITM_600036, ISRO_380015, VSBH_731235, INFO_382007 |