| Key Title | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures |
|---|---|
| Publisher | American Vacuum Society |
| Language | |
| Country | United States |
| Place | College Park, MD |
| Publication Date | 2012 |
| Topics | PHYSICS |
| ISSN | 21662746 |
| Dewey | 533.5 |
| University | INFO_382007 |