| Key Title | Journal of Vacuum Science and Technology B. Microelectronics and Nanometer Structures |
|---|---|
| Publisher | American Vacuum Society |
| Language | |
| Country | United States |
| Place | College Park, MD |
| Publication Date | 2006 |
| Topics | PHYSICS |
| ISSN | 10711023, 2166-2746 |
| Dewey | 533.5 |
| University | IITK_208016, IISC_560012, IITB_400076, IITM_600036, ITKH_721302, INFO_382007 |