Key Title: | Journal of Vacuum Science and Technology B. Microelectronics Processing and Phenomena | CODEN: | JVTBD9 | ISSN: | 0734-211X | Language: | eng | Frequency: | Bi-M | Publisher: | New York, NY, American Vacuum Society | Publication Date: | 1983-2005 | Notes: | Supersedes in part | Subject Headings: | PHYSICS | DDC Class No: | 533.5 |
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222 | 0|aJournal of Vacuum Science and Technology B. Microelectronics Processing and Phenomena |
245 | 10|aJournal of Vacuum Science and Technology B. Microelectronics Processing and Phenomena |
260 | |aNew York, NY|bAmerican Vacuum Society |
044 | |dUS |
650 | 00|aPHYSICS |
022 | 0 |a0734-211X |
780 | 00|aJournal of Vacuum Science and Technology|x0022-5355 |
785 | 00|aJournal of Vacuum Science and Technology B. Microelectronics Processing and Phenomena|x1071-1023 |
362 | 0 |a1983-2005 |
545 | |aSupersedes in part <Journal of Vacuum Science and Technology> (ISSN <0022-5355> |
310 | |aBi-M |
082 | 0 |a533.5 |
850 | |aHYDR-500046 |
950 | |aHYDR-500046|bH|cVol.1-5, 1983-1987(missing: Vol.4) |
850 | |aIITM-600036 |
950 | |aIITM-600036|bH|cVol.10,1973+(missing: Vol.1983-99) |
850 | |aISRO-380015 |
950 | |aISRO-380015|bH|cVol.1,1983-(missing: Vol.2,No.2,1985; Vol.7,No.4,1989) |
850 | |aVSBH-731235 |
950 | |aVSBH-731235|bH|cVol.3,1985- |
850 | |aINFO-382007 |
950 | |aINFO-382007|bE|cAmerican Institute of Physics(1999-01 - 2005-11) |
956 | 4 |aINFO-382007|uhttp://link.aip.org/link/?JVTBD9|zAmerican Institute of Physics(1999-01 - 2005-11) |