Key Title: Journal of Vacuum Science and Technology B. Microelectronics Processing and Phenomena
CODEN: JVTBD9
ISSN: 0734-211X
Language: eng
Frequency: Bi-M
Publisher: New York, NY, American Vacuum Society
Publication Date: 1983-2005
Notes: Supersedes in part (ISSN <0022-5355>
Subject Headings: PHYSICS
DDC Class No: 533.5
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030 |aJVTBD9
222 0|aJournal of Vacuum Science and Technology B. Microelectronics Processing and Phenomena
245 10|aJournal of Vacuum Science and Technology B. Microelectronics Processing and Phenomena
260 |aNew York, NY|bAmerican Vacuum Society
044 |dUS
650 00|aPHYSICS
022 0 |a0734-211X
780 00|aJournal of Vacuum Science and Technology|x0022-5355
785 00|aJournal of Vacuum Science and Technology B. Microelectronics Processing and Phenomena|x1071-1023
362 0 |a1983-2005
545 |aSupersedes in part <Journal of Vacuum Science and Technology> (ISSN <0022-5355>
310 |aBi-M
082 0 |a533.5
850 |aHYDR-500046
950 |aHYDR-500046|bH|cVol.1-5, 1983-1987(missing: Vol.4)
850 |aIITM-600036
950 |aIITM-600036|bH|cVol.10,1973+(missing: Vol.1983-99)
850 |aISRO-380015
950 |aISRO-380015|bH|cVol.1,1983-(missing: Vol.2,No.2,1985; Vol.7,No.4,1989)
850 |aVSBH-731235
950 |aVSBH-731235|bH|cVol.3,1985-
850 |aINFO-382007
950 |aINFO-382007|bE|cAmerican Institute of Physics(1999-01 - 2005-11)
956 4 |aINFO-382007|uhttp://link.aip.org/link/?JVTBD9|zAmerican Institute of Physics(1999-01 - 2005-11)


Current Holding Institutions

No Holding Institutions Available

Holdings Institutions

University of Hyderabad, Hyderabad, Available Volumes: Vol.1-5, 1983-1987(missing: Vol.4)
Indian Institute of Technology, Madras, Available Volumes: Vol.10,1973+(missing: Vol.1983-99)
Space Applications Centre (SAC), Available Volumes: Vol.1,1983-(missing: Vol.2,No.2,1985; Vol.7,No.4,1989)
Visva-Bharati, Santiniketan, Available Volumes: Vol.3,1985-