| Key Title: | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures | ISSN: | 2166-2746 | Language: | eng | Frequency: | Bi-M | Publisher: | College Park, MD, American Vacuum Society | Publication Date: | 2012- | Notes: | IP based Access provided to 100 universities. Archive access available under consortium from Vol.20 No.1 - Vol.26 No.6 | Subject Headings: | PHYSICS | DDC Class No: | 533.5 | Online Availability: | http://ojps.aip.org/jvstb/ (IP based access available from year 2002 to 2008) |
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