Key Title: | Journal of Vacuum Science and Technology B. Microelectronics and Nanometer Structures | CODEN: | JVTBD9 | ISSN: | 1071-1023 | Language: | eng | Frequency: | Bi-M | Publisher: | College Park, MD, American Vacuum Society | Publication Date: | 2006-2012 | Notes: | Subscr. to: AIP Member and Subscriber Service, 500 Sunnyside Blvd., Woodbury, NY 119797-299 Also avail. in microform from AIP,UMI Also available CD-ROM Covers microelectronics, microlithography, materials processing and characterization, nanometer Formerly: Journal of Vacuum Science and Technology. Part B. Microelectronics Processing and Phenomena (ISSN 0734-211X); Which superseded in part: Journal of Vacuum Science and Technology (ISSN 0022-5355) | Subject Headings: | PHYSICS | DDC Class No: | 533.5 | Online Availability: | http://avspublications.org/jvstb/ |
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