Key Title: Journal of Vacuum Science and Technology B. Microelectronics and Nanometer Structures
CODEN: JVTBD9
ISSN: 1071-1023
Language: eng
Frequency: Bi-M
Publisher: College Park, MD, American Vacuum Society
Publication Date: 2006-2012
Notes: Subscr. to: AIP Member and Subscriber Service, 500 Sunnyside Blvd., Woodbury, NY 119797-299
Also avail. in microform from AIP,UMI
Also available CD-ROM
Covers microelectronics, microlithography, materials processing and characterization, nanometer
Formerly: Journal of Vacuum Science and Technology. Part B. Microelectronics Processing and Phenomena (ISSN 0734-211X); Which superseded in part: Journal of Vacuum Science and Technology (ISSN 0022-5355)
Subject Headings: PHYSICS
DDC Class No: 533.5
Online Availability: http://avspublications.org/jvstb/


Current Holding Institutions

No Holding Institutions Available

Holdings Institutions

Indian Institute of Technology, Kanpur
Indian Institute of Science, Bangaluru, Available Volumes: NULL(missing: NULL)
Indian Institute of Technology, Bombay, Available Volumes: NULL(missing: NULL)
Indian Institute of Technology, Madras, Available Volumes: NULL(missing: NULL)
Indian Institute of Technology, Kharagpur