Growth and characterization of DC magnetron spurttered molybdenum oxide films for microelectronic applications
Investigations on magnetron sputtered tantalum oxide films for capacitor applications
Studies in thin filmsphysical investigations on magnetron sputtered copper nitride films
Studies in thin films physical investigations on magnetron sputtered copper nitride films
Studies in thin films preparation and characterization of dc reactive magnetron sputtered cdo and zno films