Key Title: | Journal of Vacuum Science and Technology. A. Vacuum, Surfaces, and Films | CODEN: | JVTAD6 | ISSN: | 0734-2101 | Language: | eng | Frequency: | Bi-M | Publisher: | New York, NY, American Vacuum Society | Publication Date: | 1983- | Notes: | Subscr to: AIP Member and Subscriber Service, 500 Sunnyside Blvd., Woodbury, NY 11797-299 Also avail. in microform from UMI,AIP Also available CD-ROM For engineers, physicists, chemists, materials scientists, microelectronics specialists, and technician Supersedes in part: Journal of Vacuum Science and Technology (ISSN 0022-5355) | Subject Headings: | PHYSICS | DDC Class No: | 533.5 |
000 | 00000cas a2200000ua 4500 |
---|---|
001 | 12187 |
003 | IN-AhILN |
005 | 20220323 000000.0 |
007 | t| |
008 | 750320c19839999dcuwn p 0 a0eng |
016 | |aUMS12187|zINFL22911|2IN-AhILN |
041 | 0 |aeng |
030 | |aJVTAD6 |
222 | 0|aJournal of Vacuum Science and Technology. A. Vacuum, Surfaces, and Films |
245 | 10|aJournal of Vacuum Science and Technology. A. Vacuum, Surfaces, and Films |
260 | |aNew York, NY|bAmerican Vacuum Society |
044 | |dUS |
650 | 00|aPHYSICS |
022 | 0 |a0734-2101|l1520-8559 |
780 | 00|aJournal of Vacuum Science and Technology|x0022-5355 |
362 | 0 |a1983- |
500 | |aSubscr to: AIP Member and Subscriber Service, 500 Sunnyside Blvd., Woodbury, NY 11797-299 Also avail. in microform from UMI,AIP Also available CD-ROM For engineers, physicists, chemists, materials scientists, microelectronics specialists, and technician |
545 | |aSupersedes in part: Journal of Vacuum Science and Technology (ISSN 0022-5355) |
310 | |aBi-M |
082 | 0 |a533.5 |
850 | |aIITK-208016 |
950 | |aIITK-208016|bH|c |
850 | |aIISC-560012 |
950 | |aIISC-560012|bH|cNULL(missing: NULL) |
850 | |aIITB-400076 |
950 | |aIITB-400076|bH|cNULL(missing: NULL) |
850 | |aISRO-380015 |
950 | |aISRO-380015|bH|cNULL(missing: NULL) |
850 | |aIITM-600036 |
950 | |aIITM-600036|bH|cNULL(missing: NULL) |
850 | |aIISC-560012 |
950 | |aIISC-560012|bD|cNULL(missing: NULL) |
850 | |aITKH-721302 |
950 | |aITKH-721302|bH|c |
850 | |aHYDR-500046 |
950 | |aHYDR-500046|bH|cVol.2-5, 1984-1987 |
850 | |aIITM-600036 |
950 | |aIITM-600036|bH|cVol.10,1973+(missing: Vol.1983-99) |
850 | |aISRO-380015 |
950 | |aISRO-380015|bH|cVol.1,1983- |
850 | |aVSBH-731235 |
950 | |aVSBH-731235|bH|cVol.3,1985- |
850 | |aINFO-382007 |
950 | |aINFO-382007|bE|cAmerican Institute of Physics(1999-01 - ) |
956 | 4 |aINFO-382007|uhttp://link.aip.org/link/?JVTAD6|zAmerican Institute of Physics(1999-01 - ) |