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Investigations on inductively coupled plasma interaction with compound semiconductor materials for etching applications

Researcher:Rawal, Dipendra Singh
Guide:Malik, Hitendra K
University:Indian Institute of Technology Delhi
Language:English
2

Investigation on inductively coupled plasma interaction with compound semiconductor materials for etching applications

Researcher:Rawal, Dipendra Singh
Guide:Malik, Hitendra K
University:Indian Institute of Technology Delhi
Language:English