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1

Preparation and Cherecterization of ferroelectric/piezoelectric thin films of PIZT/ZaO and their integration with mems processing

Researcher:Ravindra, Singh
Guide:Chandra, Sudhir
Goel, T C
University:Indian Institute of Technology Delhi
Language:English
2

Preparation and Cherecterization of ferroelectric/piezoelectric thin films of PIZT/ZaO and their integration with mems processing

Researcher:Ravindra, Singh
Guide:Chandra, Sudhir
Goel, T C
University:Indian Institute of Technology Delhi
Language:English